MRS Bulletin: Focused Ion Beam Microscopy and Micromachining Nanometer Nanophotonics


May 2007
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Focused Ion Beam Microscopy and Micromachining
Volume 32, No. 5
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Guest Editors: Cynthia A. Volkert and Andrew M. Minor
The recent availability of commercial focused ion beam (FIB) microscopes has rapidly led to widespread use in Materials research. FIB instruments have both imaging and micromachining capabilities at the nanometer-to-micrometer scale; thus, a broad range of fundamental studies and technological applications have been enhanced or made possible by FIB technology. This issue highlights specific applications of the FIB in Materials science, its particular strengths in sample preparation for transmission electron microscopy, and its potential for ion beam fabrication and prototyping.
Also in this issue is the technical feature “Smart Nanotextiles: A Review of Materials and Applications,” by Coyle et al. This article outlines current research in nanotechnology application to fabrics, from fiber manipulation and development to the end uses of smart nanotextiles.
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Theme Article - Focused Ion Beam Microscopy and Micromachining
Cynthia A. Volkert and Andrew M. Minor, Guest Editors

   
Theme Article - TEM Sample Preparation and FIB-Induced Damage
Joachim Mayer, Lucille A. Giannuzzi, Takeo Kamino, and Joseph Michael

   
Theme Article - Three-Dimensional Microstructural Characterization Using Focused Ion Beam Tomography
Michael D. Uchic, Lorenz Holzer, Beverley J. Inkson, Edward L. Principe, and Paul Munroe

   
Theme Article - Focused Ion Beam Micro- and Nanoengineering
Richard M. Langford, Philipp M. Nellen, Jacques Gierak, and Yongqi Fu

   
Theme Article - Fundamentals of Focused Ion Beam Nanostructural Processing: Below, At, and Above the Surface
Warren J. MoberlyChan, David P. Adams, Michael J. Aziz, Gerhard Hobler, and Thomas Schenkel

   
Technical Feature - Smart Nanotextiles: A Review of Materials and Applications
Shirley Coyle, Yanzhe Wu, King-Tong Lau, Danilo De Rossi, Gordon Wallace, and Dermot Diamond

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