Introduction to Micro Fabrication Micro Nanomanufacturing Nanotechnology Molecular Machinery Books
Introduction to Micro Fabrication Micro Nanomanufacturing Nanotechnology Molecular Machinery Books |
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TitleIntroduction to Micro Fabrication Micro Nanomanufacturing Nanotechnology Molecular Machinery
Author(s)/Editor(s)Sami Franssila
Published ByJohn Wiley & Sons
Product Information422 PPPublished: Jun 01, 2004
DescriptionMicrofabrication is the key technology behind integrated circuits, microsensors, photonic crystals, inkjet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. "Introduction to Microfabrication" shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions.The book features a comprehensive presentation of basic fabrication processes. It emphasizes materials and microstructures, rather than device physics. In-depth discussion on process integration is included, which shows how processes, Materials and devices interact. A wealth of examples of both conceptual and real devices are given. "Introduction to Microfabrication" includes 250 homework problems for students to familiarize themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication. This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.
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SME IdentificationProduct ID: BK05PUB20ISBN: 978-0470851067 |
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