Fundamentals of Microfabrication Micro Nanomanufacturing Nanotechnology Molecular Machinery Books
Fundamentals of Microfabrication Micro Nanomanufacturing Nanotechnology Molecular Machinery Books |
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TitleFundamentals of Microfabrication Micro Nanomanufacturing Nanotechnology Molecular Machinery
Author(s)/Editor(s)Marc Madou
Published ByCRC Press
Product Information752 PPPublished: Jun 01, 2002
Description"Fundamentals of Microfabrication," 2nd edition offers the most comprehensive introduction to the science of miniaturization. It includes well-chosen examples and hundreds of illustrations, many in full color. Top-down and bottom-up manufacturing methods are reviewed. Bridging the gap between "wet" and "dry" microengineering, the book details an abundance of industrial and medical MEMS applications, from the historical to the state-of-the-art. MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement has come new applications and rapid advances in the technologies and techniques needed to fabricate increasingly miniature devices that are literally changing our world.Unique, in-depth coverage of the science of miniaturization is covered, along with its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, "Fundamentals of Microfabrication" provides the background, tools, and directions you need to confidently choose fabrication methods and Materials for a particular miniaturization problem. The book also provides extensive lists of references, Web links, and suggestions for further reading.
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SME IdentificationProduct ID: BK05PUB18ISBN: 978-0849308260 |
Titel
Fundamentals of Microfabrication Micro Nanofertigung Nanotechnologie Molekulare Maschinen

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